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Removal Rate, Uniformity and Defectivity Studies of Chemical Mechanical Polishing of BPSG Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 613 / 2000
- Published online by Cambridge University Press:
- 14 March 2011, E8.6.1
- Print publication:
- 2000
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Using Wafer-Scale Patterns for CMP Analysis
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- Journal:
- MRS Online Proceedings Library Archive / Volume 613 / 2000
- Published online by Cambridge University Press:
- 14 March 2011, D11.8.1/E8.8.1
- Print publication:
- 2000
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A Novel Retaining Ring in Advanced Polishing Head Design for Significantly Improved CMP Performance
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- Journal:
- MRS Online Proceedings Library Archive / Volume 566 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 63
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- 1999
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The Chemistry of Boron and Titanium Diboride Formation: Decomposition of TiCl4 and BCl3 in Hydrogen and Helium*
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- Journal:
- MRS Online Proceedings Library Archive / Volume 410 / 1995
- Published online by Cambridge University Press:
- 10 February 2011, 465
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- 1995
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A Model of the Gas-Phase Chemistry of Boron Nitride CVD From BCl3 and NH 3*
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- Journal:
- MRS Online Proceedings Library Archive / Volume 410 / 1995
- Published online by Cambridge University Press:
- 10 February 2011, 459
- Print publication:
- 1995
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Modeling the GAS-Phase Chemistry of Silicon Carbide Formation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 363 / 1994
- Published online by Cambridge University Press:
- 15 February 2011, 39
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- 1994
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The Decomposition of Methyltrichlorosilane in Hydrogen and Helium
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- Journal:
- MRS Online Proceedings Library Archive / Volume 363 / 1994
- Published online by Cambridge University Press:
- 15 February 2011, 27
- Print publication:
- 1994
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The Decomposition of Methyltrichlorosilane: Studies in A High-Temperature Flow Reactor
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- Journal:
- MRS Online Proceedings Library Archive / Volume 334 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 105
- Print publication:
- 1993
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